With the arrival of digital transformation innovations such as, Generative AI, Industry 2.0, autonomous vehicles, and digital twins the demand for semiconductor chip manufacturing continues to grow. As a result, sustainability measures and reducing the environmental impact will become a key area of focus for manufacturers as well as governments and local energy regulators. To address this sustainability challenge, we need to work individually as organizations and collectively as an industry to define goals and agree on actions. In his keynote speech at SEMICON West 2020, Applied’s CEO Gary Dickerson put forth a call to action for the industry to enable a smart, digital future while simultaneously reducing our environmental impact. As the famous physicist Lord Kelvin once said, “If you cannot measure it, you cannot improve it”. EcoTwinTM is a digital twin platform developed by Applied Materials that enables on-demand energy and chemical consumption of semiconductor manufacturing equipment. By synchronizing data from multiple sensors, and leveraging domain knowledge and models, detailed reports of carbon footprint and related consumption parameters from both the fab and sub-fab are automatically generated. The implementation of EcoTwin is envisioned over a couple of distinct phases. In its Monitor phase, EcoTwin provides transparency and actionable insights to identify opportunities for sustainable solutions in product and process development. In the Explore phase, EcoTwin provides a myriad of tools aimed at consumption predictions, what-if scenarios, and beyond. Ultimately, the manufacturers may adopt and implement opportunities for autonomous decision-making and action-taking steps triggered by this system, at the chamber, tool, or fleet-level. This sustainability-driven goal would require calibrated processes and hardware digital twins that can realistically predict impact of any changes to the system, not only at the environmental impact level, but also for on-wafer process results.