Steven Scheer, PhD in Chemical Engineering

Senior Vice President Advanced Patterning, Process and Materials
imec

Steven Scheer has been the Vice President of Advanced Patterning Process and Materials (APPM) at imec since January 2019. His responsibilities include patterning, unit process and new materials development for logic, memory, photonics, and 3D integration. Prior to that, he was an account technology director with Tokyo Electron Ltd. (TEL), responsible for customers in the Portland OR area. He worked at TEL for 13 years where he was responsible for R&D in patterning and cleans, including management roles in the US as well as at TEL’s factory in Kumamoto Japan and with the corporate R&D organization in Tokyo. He began his research career at IBM in Fishkill NY, working on 90 and 65 nm patterning development. He holds a Ph.D. in Chemical Engineering from the University of Texas at Austin.

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Presentation(s):

• Patterning Challenges and Innovations on the Eve of High NA EUV Lithography

  Thursday, July 13, 2023
  1:55 PM – 2:15 PM PDT