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Paul Carey, PhD

Director, MEMS and Sensors Industry Group (MSIG)
SEMI
Milpitas, CA, United States


Dr. Paul Carey is the Director of the SEMI MEMS & Sensors Industry Group (MSIG). He joined SEMI in 2021 and is responsible for managing the current US Government funded Positioning, Navigation, and Timing (PNT) program, online webinars, and supporting the Manufacturing, Device and Reliability Workgroups as well as the Smart City Task Force and all MSIG related conferences and events. Before joining SEMI, he worked at X-Ray imaging backplane supplier, dpiX (now called InnovaFlex Foundary), in various positions starting in 2003. He was the process, equipment, and yield manager in their Gen 2.5 Palo Alto glass Fab until 2012 when dpiX moved its production to a new Gen 4.5 Fab in Colorado Springs. He rejoined dpiX in 2014 and worked on the flexible substrate equipment selection team and later became their first business development manager in 2018 when dpiX announced its Foundry Business.

Earlier positions were held at Applied Materials where he helped develop a laser annealing system for semiconductor shallow junctions and silicides, and start-up company FlexICs, where he was a co-founder and VP of Engineering. FlexICs developed low temperature thin film transistor (TFT) fabrication technology relevant to flexible OLED displays now used in cellphones. Prior to founding FlexICs, he worked as a staff scientist and program leader at Lawrence Livermore National Laboratory where his group initially developed the low temperature polysilicon-on-plastic TFT technology.

Dr. Carey received a double major BS from UC Berkeley in Electrical Engineering and Computer Science (EECS) and Materials Science and Engineering (MSE). He received his MS in EECS from UC Berkeley and Ph.D. in MSE from Stanford University.

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