This presentation provides an overview into fab industrial control systems including the process specific support systems (PSSS), toxic gas/hazardous production material life safety systems (TGM & HPM-LSS) and facility control systems (FCS).
Firstly, this will discuss the network infrastructure required for the PSSS equipment and its purpose. Generally, these systems are vendor-specific, but have ties throughout the fab to facility control systems and tools. Secondly, the presentation will give an outline to the industrial control system architecture for facility management (conventional I&C) and then the presentation will transition into the TGM & HPM-LSS including types of hazards frequently encountered and how to manage it from a facilities standpoint, which can include overall hazard assessment, as well as process safety requirements and strategies. This includes gas detection, double-containment and other mechanisms.
And finally, the presentation will go into how control systems can be used to integrate the tool and subfab equipment allowing better verbosity of the processes and the ability to ensure higher uptime and reduced wafer loss due to equipment failure. There will also be discussion around tool monitoring and communication strategies with the TGM & HPM-LSS system and the other PSSS support systems.
