Managing Director of Strategic Marketing Lam Research Fremont, CA, United States
MEMS devices have become well established as critical components in a wide range of everyday applications. Accelerometers and gyroscopes improve safety in automotive applications, RF filters enable wireless connectivity in mobile phones and MEMS microphones are at the heart of voice control technologies that connect us to an ever-increasing range of smart, consumer products. As the demand on device performance and manufacturing volume increases, the need for improved MEMS manufacturing solutions becomes ever more prevalent. For example, many established MEMS fabs and foundries are running at very high utilization and continuous improvements in manufacturing productivity and yield are becoming increasingly desirable.
At the same time, MEMS developers are looking to the next generation of devices that will enable new applications and improve the performance of existing solutions. Capacitive based MEMS devices have proven to be highly successful, but after significant improvements of both design and manufacturing it is becoming increasingly difficult to improve the perform of capacitive MEMS. To overcome this challenge, designers are looking to piezoelectric based MEMS devices that can offer a paradigm shift in capability.
In this presentation, we will discuss how Lam Research is combining production proven high volume manufacturing solutions, virtual fabrication techniques and novel process capabilities to address these challenges and technology inflections.